lOptical coupling structure made by imprinting between single-mode polymer waveguide and embedded VCSEL

Polymer-based integrated optics is attractive for inter-chip optical interconnection applications, for instance, for coupling photonic devices to fibers in high density packaging. In such a hybrid integration scheme, a key challenge is to achieve efficient optical coupling between the photonic chips and waveguides. With the single-mode polymer waveguides, the alignment tolerances become especially critical as compared to the typical accuracies of the patterning processes. We study novel techniques for such coupling requirements. In this paper, we present a waveguide-embedded micro-mirror structure, which can be aligned with high precision, even active alignment method is possible. The structure enables 90 degree bend coupling between a single-mode waveguide and a vertical-emitting/detecting chip, such as, a VCSEL or photodiode, which is embedded under the waveguide layer. Both the mirror structure and low-loss polymer waveguides are fabricated in a process based mainly on the direct-pattern UV nanoimprinting technology and on the use of UV-curable polymeric materials. Fabrication results of the coupling structure with waveguides are presented, and the critical alignment tolerances and manufacturability issues are discussed

Nanoimprint lithography-based fabrication of plasmonic array of elliptical nanoholes for dual-wavelength, dual-polarisation refractive index sensing

We report on the novel fabrication and characterisation of plasmonic arrays of elliptical nanohole, and their use for refractive index based sensing. The substrates were fabricated using nanoimprint lithography into a chromium hard mask followed by transfer of the patterns into the underlying gold layer by dry etching—a combination of processes amendable to mass manufacturing. 3D-FDTD simulations were undertaken and showed the transmission spectrum was dependant upon the polarisation of the incident light, with a series of minima that can be attributed to plasmonic effects on the gold/water or gold/substrate interfaces. Each polarisation showed two peaks on the gold/water interface, one in the visible and one in the near-infrared part of the spectrum. Simulated electric field profiles showed that the electric field in the infrared propagates deep in the bulk while the one in the visible was more tightly bound to the surface. Experimental transmission spectra of the fabricated samples showed good agreement with the simulated ones. Bulk refractive index experiments were carried out and sensitivities of 293 nm/RIU and 414 nm/RIU were obtained for the two spectral features of interest when the polarisation was along the long axis of the elliptical nanohole for the visible and infrared features, respectively, and 293 nm/RIU and 323 nm/RIU measured when the polarisation was along the short axis of the nanohole